Papers:
DIRECT: An Efficient Optimization Scheme for Mask Generation Using Inverse Lithography
Resolution Enhancement Technologies (RETs) are widely used to cope with the severe optical effects that are manifests in sub-wavelength lithography. Inverse Lithography Technique (ILT) has recently been proposed [1-3] as an effective RET for sub [...]
Resist Mask Designs for Quantum Dot Transistor Using E-Beam Nanolithography
Hashim U., Sutikno S., Jamal Z.A.Z., Northern Malaysia University College of Engineering (KUKUM), MY
Quantum dot single electron transistor (QD SET) can be fabricated using e-beam nanolithography (EBL) and then continued by combination process of pattern dependent oxidation (PADOX) and high density plasma etching. EBL was used to pattern [...]
Femtosecond laser micromachining of IC for semiconductor defect analysis
Halbwax M., Sarnet T., Hermann J., Delaporte Ph., Sentis M., Fares L., Haller G., LP3 UMR CNRS 6182, FR
The detection and analysis of defects in Integrated Circuits (IC) are major challenges faced by the semiconductor industry as outlined by the roadmap in the latest International Technology Roadmap for Semiconductors (ITRS). Advanced tools used [...]
Numerical Simulation of NIL Process Based on Continuum hypothesis
Nano imprint lithography(NIL) is a cost-efficient, high-throughput processing technique to transfer nano-scale patterns onto thin polymer films. Polymers used as the resist include UV cured resins as well as thermoplastics such as polymethyl-methacrylate(PMMA). In this [...]
Nanoimprint Mold Manufacturing with Focused Ion Beam
Chung M., Huang B.R., Weng M.H., Fu C.S., Chang Y.Y., Lai S.W., Chiou J.M., Chen Y-C, Tzeng Y.H., Southern Taiwan University of Technology, TW
Nanoimprint lithography (NIL) is an emerging low cost technique for reproducing sub-100 nm pattern in various applications; however, manufacturing the mold for nanoimprint has been a key issue both in expense and resolution. Focused Ion [...]
Nanostructuration of sol-gel thin films
Peroz C., Goletto V., Foresti M., Heitz C., Le Gratiet L., Barthel E., Sondergard E., Laboratoire mixte CNRS/Saint-Gobain, FR
Sol-gel chemistry is very versatile and structuring sol-gel materials will allow a fine tuning of chemistry, electromagnetic, optical and mechanical properties. We explore the possibilities to combine sol-gel chemistry to large scale patterning at low [...]
Fabrication of Perforated Membranes in Polymers by Imprint Lithography
The ability to imitate architecture of naturally existing systems in an economical way is important because this will provide platform for various fundamental and applied research activities. One such structure is a perforated membrane having [...]
Synthesis and Characterizations of ZnO Nanorods Arrays for Solar Cell and Chemical Sensor Applications
Synthesis of nanorod based solar cells and sensors are quickly directed towards developing alternative, lightweight, flexible nanodevices for wide area of commercial applications. Many research papers has been published, in recent years, in the area [...]
Multifunctional Materials Based on Chitosan, Globular Protein and Gold Nanoparticles
Indrea E., Dreve S., Bratu I., Mihailescu G., Olenic L., Tomoaia G., Tomoaia-Cotisel M., Mocanu A., Horovitz O., Tomoaia-Cotisel M., Babes-Bolyai University of Cluj-Napoca, RO
Our studies are focused on the structure of thin films of chitosan and of globular protein in both the absence and the presence of negatively charged gold nanoparticles. Deacetilated chitosan of high molecular weight and [...]
Parallel Pd Nanoribbons by Spontaneous Organization of Pd Nanoparticles
Taratula O., Chen A.M., Zhang J., Chaudry J., Barnerjee I., He H., Rutgers-Newark, The State University of New Jersey, US
A simple solution phase method was used to fabricate Pd nanoribbons which are composed be an array of Pd nanoparticles separated with nanometers gaps. A remarkable feature of this method is that no templates are [...]
Economical Approaches to Clean Space
For nanotechnology research and pilot manufacturing facilities, whether new construction or retrofit, clean space is commonly a critical requirement. These spaces can become one of the expensive, hard to integrate programs of the project. These [...]
Simulation of Virtual Nanoparticle tracking using calculated forces for an Atomic Force Microscope and Optical Tweezers
Nanomanufacturing necessitates manipulation of nanoparticles in order to build functional three dimensional structures. Manipulation of nanoparticles takes place in microenvironments where it is not practical for the user to manually interact with the nanoparticles. So [...]
1D transition metal oxide materials: preparation and applications
Tätte T., Paalo M., Talviste R., Kisand V., Saal K., Mäeorg U., Lõhmus A., Kink I., University of Tartu, EE
Recently many new technologies have been suggested for designing silica based optical devises in nanoscale. However, there are insuperable drawbacks in realizing optics based on silica (glass and quartz) because of their low refractive indexes. [...]
MOS Structures Containing Amorphous Silicon Nanoparticles for Application in Memory Devices
Nedev N., Stoytcheva M., Nesheva D., Manolov E., Brüggemann R., Levi Z., Zlatev R., Valdez B., Alvarez L., Universidad Autónoma de Baja California, MX
Metal-Oxide-Silicon structures containing a layer with amorphous silicon nanoparticles in a silicon oxide matrix are fabricated by sequential physical vapour deposition of SiOx (x=1.15) and RF sputtering of SiO2 on n-type crystalline silicon, followed by [...]
Electrostatic Printing of CNT Liquid Toners
Using techniques developed from the electrostatics industry and liquid toner techniques from the copier/laser printer industry, we will describe techniques for the patterning and manipulation of carbon nano-tubes. We will also describe a self assembly [...]
Fabrication and characterization of Alq3 electrically actuated nanospring arrays
Glancing Angle Deposition (GLAD) is a single step physical vapour deposition (PVD) technique utilizing oblique deposition angles to create porous thin film helical structures. Previous nanospring work has used inorganic materials such as SiO2. Here, [...]
Densification and Grain Growth During the Sintering of Nanoscale SiC
Bothara M., Park S-J, German R.M., Sudarshan T.S., Radhakrishnan R., Atre S.V., Oregon Nanoscience & Microtechnologies Institute, US
Numerous routes have been developed recently for the synthesis of a broad range of ceramic and metal nanoparticles. However, applications for these new materials have lagged behind owing to a limited understanding of processing methods [...]
Sonochemical Coating of TiC nanoparticles on expandable polymeric microspheres, Thermal & Mechanical properties of microspheres/epoxy nanocomposites
Summary • Sonochemical method has been developed to coat nanoparticles on expandable polymeric microspheres. • n-Hexane is used as a solvent and proved to be a suitable solvent for sonochemical coating of nanoparticles on these [...]
Novel Approaches for Functional Patterns and Microfluidic Synthesis
We describe here functional polymer synthesis for advanced nanotechnology. This includes elastomeric patterns fabricated using photocurable PDMS prepolymers. We also demonstrate MIP (molecularly imprinted polymer) patterns; MIP is produced by “molecular imprinting”, a general protocol [...]
Fabrication of Nanoparticulate Inks for Applications in Printable Electronics
The main impetus of this work is the fabrication of stable suspensions (in regard to aggregation) suitable for a printing process. Therefore semiconducting nanoparticles were dispersed systematically in organic solvents using a variety of methods [...]
Piezoelectric Inkjet Print Head Technology for TFT-LCD Panel Fabrication
Flat Panel Display (FPD) technologies have been sweeping through the market which includes TVs, desktop monitors, notebook PCs, digital cameras, portable DVD, and so forth . Among them, TFT-LCD is dominating and approaching large size [...]
Growth and Engineering of High Aspect-Ratio AAO Templates Integrated on Silicon Substrates
We have developed a CMOS-compatible process for manufacturing nanowires directly on silicon (or other) substrates. This process removes some of the steps for conventional nanowire manufacture. The result are highly-ordered, high aspect-ratio nanowires for use [...]
Responsive Hydrogels as Model Materials to Study the Deformation Behavior of Patterned Polymer Nanostructures
Tirumala V.R., Stafford C.M., Huang R., Lin E.K., Ocola L.E., National Institute of Standards and Technology, US
The mechanical stability of polymer nanolines is crucial to the success of semiconductor device fabrication. Recent experimental and modeling studies have focused on the influence of processing conditions on the stability of densely patterned lines. [...]
Title: Nano/micro-structures formation driven by local protonation of polymer thin films via dip-pen nanolithography
SUMMARY Nanostructures are created by stimulating the mechanical response of polymer materials upon confining protonation reaction locally via dip-pen. ABSTRACT While dip-pen nanolithography uses a sharp tip to anchor molecules on the substrate to form [...]
Electroluminescence from Surface Oxidized Silicon Nanoparticles Randomly Dispersed within a Polymer Matrix
For the first time we have demonstrated hybrid silicon organic light emitting diodes. This process uses particles created in a nonthermal silane plasma which are treated by photo oxidation to passivate the surface. Particles were [...]
Electroluminescence of ZnO Nanowire/p-GaN Heterojunction Light Emitting Diodes
ZnO nanowire/p-GaN heterojunction light emitting diodes (LEDs) were fabricated by growing ZnO nanowire vertical arrays in aqueous solution on Mg-doped p-GaN films. Diode-like, rectifying I-V characteristics were recorded at room temperature and a “current crowding” [...]
Monolayer to Multilayers Nanostructural Evolution in N type Oligothiphenes: Implications for OFET Performance
This study elucidates the nature of the interface between the organic semiconductor and source-drain electrodes in OFET devices. The pitted and disordered monolayer results in poor mobilities for bottom contact OFETs. Reorientation of the molecules [...]
Parylene Nanospheres, Nanotubes & Nanocoatings for Medical and Electronics Applications
This paper describes the methods to obtain Parylene hollow nanospheres and nanotubes, and their potential applications along with application of Parylene coatings on nanostructured substrates for functionality and reliability enhancement. Various types of spheres and [...]
Development of Nanostructures, Nanodevices, Nanocomposites, and Hierarchical Nanocomposites at Hawaii Nanotechnology Laboratory
This paper presents activities related to the development of nanostructures, nanodevices, nanocomposites, and hierarchical nanocomposites at the Hawaii Nanotechnology Laboratory of the Department of Mechanical Engineering of the University of Hawaii at Manoa. On nanostructures, [...]
Influence of Stress and Temperature on the Microstructure Stability of Nanocrystalline Materials
Rajgarhia R.K., Koh S-W., Spearot D., Saxena A., Selvam P., Tummala R., University of Arkansas, Fayetteville, US
Nanocrystalline materials have improved mechanical and electrical properties in comparison to their microcrystalline counterparts due to their reduced crystallite or grain size. Loss of these unique properties due to grain growth under the affect of [...]
Grain Size Distribution in CoCrPtO-Based Perpendicular Magnetic Recording Media
A multilayer disk structure based on a CoCrPtO magnetic layer is one of the material choices for fabrication of perpendicular magnetic recording media. In these devices, nano-sized (typically ~10 nm in diameter), magnetically hard cobalt-rich [...]
400-900 nm Light Emitting Silicon Nanoparticles
A novel process has been developed to create an aerosol of passivated silicon nanoparticles that emit controlled colors from blue to the near IR. The emission is stable in air. This is the first ever [...]
Quantum Correction for the Current-Based One-Particle Monte-Carlo Method
In a previous work we proposed a one-particle Monte-Carlo method based on equations for the currents. Our method has the advantage of being able to take into account arbitrary generation-recombination processes self-consistently. Recently, we extended [...]
Single Election Trapping in Nanoscale Transistors; RTS(Random Telegraph Signals) and l/f Noise
Random telegraph signal, RTS, noise[1] is most obvious in submicron devices with traps, for example in nanoscale MOS transistors, MOSFET’s, with a low number of carriers. RTS is sometimes an indicator of poor device quality [...]
Nanoscale hydrophobic coatings for the separation of liquid mixtures
Organofunctional nanoscale silane coatings are widely used to modify surface chemistry. Such coatings have many applications in micro- and nanofluidics because liquid motion on these scales is strongly influenced by capillary or wall effects. In [...]
Utilizing PRINTTM Technology to Create Precision Nanopatterned Films
We describe the use of a new, enabling class of materials for performing precise, nano-scale imprint lithography for patterned film replication. These low surface energy, minimally adhesive, room-temperature photocurable perfluoropolyether (PFPE) elastomers, trademarked as Liquidia’s [...]
The Si-tag for Immobilizing Proteins on a Silicon Device
Targeting functional proteins to specific sites on a silicon device is essential for the development of new biosensors and supramolecular assemblies. Recently, we found ribosomal protein L2 as a silicon-binding protein, which can be used [...]
Low Temperature Nanolayers of Metal Oxides By MVD
Molecular Vapor Deposition (MVDTM) techniques and equipment have been successfully used for many coating applications in the MEMS, disk drive, and nano-imprint lithography fields. By exploiting the ability of MVD to deposit an in-situ metal [...]
From Particle Self-Assembly to the Creation of Biologically Relevant Nanopatterns
Nanopatterns are becoming increasingly popular in the field of bioscience and bioengineering because they provide novel tools to address biological problems. For example, protein nanoarrays not only enable molecular level statistics of binding events but [...]
Manufacturable nanoscale membranes – material development and biological separations
Gaborski T.R., Striemer C.C., Snyder J.L., Fang D.Z., Fauchet P.M., McGrath J.L., University of Rochester, US
We have developed a new class of ultrathin porous nanocrystalline silicon (pnc-Si) membranes using inexpensive and scalable silicon fabrication techniques. Pnc-Si is formed from a deposited amorphous silicon thin film, where nanoscale pores are introduced [...]
Nano-Patterned Surfaces Enhance Immunoreaction Efficiency
Valsesia A., Mannelli I., Colpo P., Bretagnol F., Ceccone G., Rossi F., European Commision Joint researcc Center, IT
Biomolecular recognition is a fundamental aspect in the biosensor development. The goal is to immobilize the biomolecule probes in an active state, limiting the non specific adsorption and maximizing their binding site accessibility for the [...]
Multifunctional Bio-Nano Patterns Derived from Colloidal Self-Assembly as Model Surfaces to Study Antigen-Antibody Interactions
Nanosphere lithography (NSL) has become a popular tool as a patterning technique recently because the method is cheap and involves extremely simple procedures compared with other nanopatterning techniques. NSL can also be applied to a [...]
Journal: TechConnect Briefs
Volume: 4, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 4
Published: May 20, 2007
Industry sector: Advanced Materials & Manufacturing
Topics: Advanced Manufacturing, Nanoelectronics
ISBN: 1-4200-6376-6