High-Sensitivity and Low-Hysteresis Inter-digital Type Capacitive Humidity Sensor on Glass Substrate by Aerosol Deposited BaTiO3

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A high-sensitivity and low-hysteresis inter-digital type capacitive humidity sensor is fabricated using Aerosol deposition (AD) of BaTiO3 films. Aerosol deposition (AD) uses shock-loading-solidification preparation mechanism as a novel ceramic film preparation technique, exhibiting the advantages [...]