This paper describes the methods to obtain Parylene hollow nanospheres and nanotubes, and their potential applications along with application of Parylene coatings on nanostructured substrates for functionality and reliability enhancement. Various types of spheres and particles with different functionality were also explored. The above structures are derived from the concept of hollow nanospheres and include non-tubular and non-fiber like surfaces, filled or coated internally and externally that may have different functions; attachment of functional groups that may be single or multiple layers, and coatings that may be metal or non metals. Parylene nanotubes can be prepared by the TUFT-process (TUFT = Tubes by fiber templates). Very thin electrospun polymer template fibers were coated conformally from the vapor phase by Parylene followed by selective removal of the core template fibers (by pyrolysis or extraction) yielding corresponding Parylene nanotubes. Parylene nanotubes loaded by different kind of metal nanoparticles were also prepared also by the TUFT process by usage of precursor-loaded template fibers.
Journal: TechConnect Briefs
Volume: 4, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 4
Published: May 20, 2007
Pages: 534 - 537
Industry sector: Advanced Materials & Manufacturing
Topicss: Advanced Manufacturing, Nanoelectronics