Sensors & MEMS

Papers:

Electrical equivalent circuit for air and liquid characterization of a multilayer micromembrane with piezoelectric actuation and read-out capabilities

, , , ,
In the field of piezoelectric-based resonators, micromembranes have revealed substantial advantages especially for biosensing experiments. To ease the design of new-membrane-based biosensors, an analytical model is crucial. We have elaborated such a model for the [...]

Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Industry sector: Sensors, MEMS, Electronics
Topic: Sensors - Chemical, Physical & Bio
ISBN: 1-4200-6184-4