Computational and analytical studies are conducted on piezoelectric beams of various materials in bending mode investigating the effect of variations in length and thickness on tip deflection that might be useful in MEMS actuators. Specifically, the materials considered are zinc oxide, poly vinylidene flouride, lead zirconate titanate, barium titanate, and piezoelectric sheet element. The computational solutions were obtained with the finite element analysis integrated into IntelliSuite (IntelliSense Corporation) software, and the analytical solutions were obtained with MATLAB. Results show that deflections are in closer agreement for beams of decreasing lengths and increasing thickness. It is noteworthy for the design of actuators that a large piezoelectric constant results in increased deflection.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Pages: 189 - 192
Industry sector: Sensors, MEMS, Electronics
Topic: Sensors - Chemical, Physical & Bio