Micro-Opto-Mechanical Pressure Sensor (MOMPS) in Sin Integrated Photonics Platform

, , , , , , , , , ,
This paper presents a Micro-Opto-Mechanical Pressure Sensor (MOMPS) manufactured in a SiN integrated photonic platform for short wavelength implementation. It implements a single wavelength Mach Zehnder Interferometer (MZI) system allowing a simple readout system. We [...]

Heterogeneous Nano-electronic Devices Enabled by Monolithic Integration of IIIV, Ge, and Si to expand future CMOS functionality

, , , , , , , , , , , , , , , , , , , , ,
3D-IC’s by stacking and connecting dies of different functions with through-silicon via processes are emerging as an upcoming heterogeneous SOC enabler. Since connectivity between stacked layers may be limited by nearest-neighbor layers, the stagnation of [...]