Report presents results of investigations aimed spray pyrolysis technology application for nano-dimensional film gas sensors (NDFGS) manufacturing. It is shown that due to spray deposition installation modification the developed technology of nanodimensional gas sensitive film formation becomes compatible with group planar technology of microelectronics. Correct selection of spray solutions has allowed to providing 150-200°C decreasing of deposition temperatures, improving the initial stoichiometry of gas sensitive film composition (post-deposition treatment is excluded and manufacturing cost is reduced) and increasing of gas sensitivity to CO by one order and to hydrogen by three orders. It is concluded that spray pyrolysis technology can be successfully used for NDFGS manufacturing.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Pages: 128 - 131
Industry sector: Sensors, MEMS, Electronics
Topic: Sensors - Chemical, Physical & Bio