Design and Characterization of new GaAs Micromechanical Thermal Converter developed for Microwave Power Sensor

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In this report we demonstrate the design of new GaAs based Micromechanical thermal converter (MTC) that creates heart of the RF power sensor microsystem. Transmitted power is the main quantity measured in RF systems. The classical approach to transmitted power measurement is based on the measurement of absorbed power waves (incident and reflected) that requires sophisticated multiple power meter structures and need complex calibration. A better technique of absorbed power measurement is based on thermal conversion, where absorbed RF power is transformed into thermal power, inside a thermally isolated system. The temperature changes induced in the MTC by electrical power dissipated in the HEMT (High Electron Mobility Tranzistor) are sensed using the temperature sensor.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Pages: 104 - 107
Industry sector: Sensors, MEMS, Electronics
Topic: Sensors - Chemical, Physical & Bio
ISBN: 1-4200-6184-4