Papers:
The mechanical stiffness and the size effect of the silicon based nano-structures using molecular dynamic (MD) simulation
Yuan C.A., van der Sluis O., van Driel W.D., van Silfhout R.B.R., Zhang G.Q., Ernst L.J., van der Sluis O., van Driel W.D., van Silfhout R.B.R., van der Sluis O., van Driel W.D., van Silfhout R.B.R., Delft University of Technology, NL
The mechanical stiffness of the silicon based nano-structures is studied using the molecular dynamics (MD) method and the size effect of the nano-structures was captured. The MD simulation procedure is based on the linear-elastic theory, [...]
Investigation of Vector Discretization Schemes for Box Volume Methods
The usage of the box integration method in Technology CAD environments is investigated. Focus is taken on methods how to discretize vectors in box volumes. The authors of this paper discuss three different methods for [...]
A new compact scalable circuit model for RF MEMS switches
In this paper, a new compact scalable circuit model for RF MEMS switches is presented. This new one-dimensional model combines the computational speed of one-dimensional models, with the accuracy of multi-dimensional models. The model includes [...]
New Analysis Method for Coupled-Field Micro Devices
MEMS actuators are typically used for either one time deployment of structures for automatic assembly or constant periodic actuation as in case of micro optic scanners. Electro-thermal actuators rely on the joule heating resulting small [...]
Frequency Domain Modeling of SAW Devices
The lack of integrated design tools for MEMS devices in general, and for Surface Acoustic Wave (SAW) devices specifically, has led to the development of tools that will enable integrated design, modeling, simulation, analysis and [...]
Modeling and Dynamics of Coupled Dome-shaped Micromechanical Oscillators
In this work we analyze a feasible approach for constructing coupled micromechanical oscillators that synchronize. For this purpose we use dome shaped micro-oscillators that have previously been used to build radios. These oscillators are fabricated [...]
Optimization of Masks for High Aspect Ration UV-Lithographic Patterning
The increasing complexity of micro actuators and micro sensors (e.g. electroplated micro coils, flux guidances, insulation and planarization layers) make new fabrication technologies and materials inevitable. For such purposes thick-film photo resists like SU-8 or [...]
A Study on the Electrical Properties of Plasma Nitrided Oxide Gate Dielectric in Flash Memory
In this paper, we address the effect of Plasma Nitridation on the gate dielectric by a combined experimental and simulation study of gate oxidation. Firstly, Boron segregation at the Si/SiO2 interface is experimentally characterized by [...]
A Method for Semi-Automated Modeling of Analog-Mixed Signal Systems in Automotive Applications based on Transient Simulation Data
Functional verification by simulation is an important step during the development of present microelectronic solutions for automotive applications. Its relevance is based on the capability to compare the behavior of a developed circuit with its [...]
Genetic Algorithm for the Design of Microchip Flow Cytometers
Robot designers and artificial-intelligence researchers have long been inspired by living things. Now, we are trying to mimic some of the most fundamental features of life while designing micro devices. In this paper we proved [...]
FEM Simulation for demolding process in thermal imprint lithography
Thermal imprint lithography is a highly potential technique utilizing molding to produce micro- and nano-structures with high throughput and at low cost. Extensive researches have been performed in understanding polymer flow behavior and cavity filling [...]
Study of Thermal Efficiency Optimization in a Twin-bubble MEMS Micro-injector
Tang H-K, Tseng F-C, Wang W.W., Lee C-K, Lee I.Y., Lee K., Lee C-K, Lee I.Y., Lee K., Lee C-K, Lee I.Y., Lee K., BenQ Corporation, TW
In this paper, the methodology of design optimization to achieve optimal thermal efficiency of a twin bubble MEMS micro-injector is reported. This twin bubble back shooting structure can reduce the problems of crosstalk and satellite [...]
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 1-4200-6184-4