, Bishop D.J.
, Boyd G.D.
, Busch P.A
, Frigo N.J.
, Goossen K.W.
, Greywall D.S.
, Iannone P.P.
, Ruel R.R.
, Walker J.A.
, Yurke B.
, Bell Laboratories, Lucent Technologies, Inc., US
This paper discusses a simple phenomenological model of squeeze-film gas damping which has been applied to the design of micromachined optical modulators operating at speeds in excess of 12Mbits/sec. The model is described by analytic [...]
A novel MEMS vibration sensor for high acceleration am-plitudes was developed in silicon technology for tool state monitoring. According to the application-specific require-ments, the piezoresistive detection of vibration with polysilicon piezoresistors deposited on a thin [...]
The manufacture of miniature Stirling cycle cryocoolers, using standard micro-machining techniques and materials has been pursued by the authors . A MEMS based cryocooler would allow integration of a cryogenic cooling system directly into a [...]
Results of the analysis and modelling of a pendulum type of accelerometer in an electrostatic field are presented. A common-mode voltage is used to yield an electrostatic positive feedback that amplifies the mechanical sensitivity. The [...]
This paper studies behavior of non-ideal vibratory micromachined gyroscopes. The use of methods of motion decomposition  is the essence of the proposed analytical approach. The method is based on partitioning the equations of motion [...]
This paper presents a new approach for finding the optimal configuration and geometrical dimensions of very small variable capacitance (VC) side drive micromotors based on a modified parallel plate capacitance model The electrostatic drive torque, [...]
Previous studies of surface micro-machined polycrystalline silicon MEMS thermal micro-actuators have shown that these simple devices can provide deflections on the order of 10 micrometers at CMOS compatible drive voltages. These thermo-mechanical devices operate by [...]
We investigate fluctuations in the mode amplitudes of vibrating micro mechined cantilevers in a gaseous environment. The movement of a micro-cantilever in thermal equilibrium consists of an superposition of its vibration modes. Each vibrating mode [...]
Silicon etching at low temperature offers the possibility of manufacturing monolithic sensors with associated electronics. For a given technology, the so-called FSBM, we have established a set of relations to describe the mechanical behavior of [...]
The signal formation in piezoresistive silicon pressure sensors has been studied for many years and is very well understood meanwhile. Nevertheless there are higher order effects of nonideal behaviour such as nonlinearities and hys-teresis effects [...]
This paper is devoted to the study of the static and dynamic behavior of a 1D torsion single crystal silicon micro mirror. Our aim is to develop a parametric model allowing the use of single [...]
Analytical models to describe coupling between different directions of motion are derived using energy methods and verified for the U-spring, crab-leg spring and the serpentine spring. Finite element analyses (FEA) are done for a range [...]
In this study, mechanical structures based on polycrystalline diamond films grown on silicon substrate are investigated. In contrast to all-silicon MEMS, additional problems arise due to the unusual properties of diamond. These effects are investigated [...]
An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is presented. The solution is directly applicable to micromachined pressure sensors. The solution is compared to finite element analysis results and [...]
Finite-element analysis (FEA) modal results of 3C-SiC lateral resonant devices anchored to a Si substrate are presented as resonant frequency versus temperature. The suspended elements are etched from a 2 mm, 3C-SiC film grown at [...]
This paper describes a 3-D finite element modeling scheme for the designing and analysis of a powerful variable ñ reluctance (VR) microactuator. The device to be modeled having the basic principles of operation of reluctance [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications