Shkel A., Howe R.T., Horowitz R.
University of California-Berkeley, US
Keywords: anisoelasticity, damping, fabrication defects, micromachined gyroscopes, motion decomposition
This paper studies behavior of non-ideal vibratory micromachined gyroscopes. The use of methods of motion decomposition [1] is the essence of the proposed analytical approach. The method is based on partitioning the equations of motion on fractions which are changing in different time scales. The approach allows rapid simulation of the long-term response of the gyroscope in presence of imperfections. The central result of the paper is the classification of errors in accordance with their in uence on the gyroscope behavior.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 605 - 608
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9666135-4-6