Analytical Modeling of Cross-Axis Coupling in Micromechanical Springs

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Analytical models to describe coupling between different directions of motion are derived using energy methods and verified for the U-spring, crab-leg spring and the serpentine spring. Finite element analyses (FEA) are done for a range of spring dimensions for each sprint type in order to verify the moels and determine the validity range. The models for the serpentine spring are then incorporated into a macromodel for usin in nodal simulation. Improvement in simulation time using the macromodel over beam-based simulation is evaluated. Cross-axis coupling in an accelerometer structure is also simulated using this macromodel.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 632 - 635
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9666135-4-6