In this study, mechanical structures based on polycrystalline diamond films grown on silicon substrate are investigated. In contrast to all-silicon MEMS, additional problems arise due to the unusual properties of diamond. These effects are investigated by modeling diamond-based micro-mechanical devices and comparing the results to measurements on processed devices. All simulations were carried out using the standard simulation tool ANSYS and measured modeling parameters.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 636 - 639
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications