Delft University of Technology – TechConnect Briefs

Hydrogel-based multi-stimuli responsive cilia

Glazer P.J., Leuven J., An H., Lemay S.G., Mendes E., Delft University of Technology, NL

We present large-scale multi-responsive cilia arrays that can be stimulated environmentally (via a pH change), electrically or magnetically. By means of micro-fabrication techniques, we created high-aspect ratio molds on which the polymer solution was cast. [...]

High accuracy dual side overlay with wet anisotropic etching for HAR MEMS

van Zeijl H.W., Best K., Sarro P.M., Delft University of Technology, NL

Through wafer etching of silicon using anisotropic wet chemical etch ants like KOH is a key process in the fabrication of many types of MEMS devices. In this work, a dual side 2 mask process [...]

An Efficient Sectionalized Modeling Approach for Introduction of

Milovanovic V., Mijalkovic S., Delft University of Technology, NL

Modeling of breakdown phenomena is becoming central problem in today's design of high-speed bipolar circuits. It is especially important for the output stages that should simultaneously provide speed and output signal power. To this end, [...]

The mechanical stiffness and the size effect of the silicon based nano-structures using molecular dynamic (MD) simulation

Yuan C.A., van der Sluis O., van Driel W.D., van Silfhout R.B.R., Zhang G.Q., Ernst L.J., van der Sluis O., van Driel W.D., van Silfhout R.B.R., van der Sluis O., van Driel W.D., van Silfhout R.B.R., Delft University of Technology, NL

The mechanical stiffness of the silicon based nano-structures is studied using the molecular dynamics (MD) method and the size effect of the nano-structures was captured. The MD simulation procedure is based on the linear-elastic theory, [...]

Nano-structure or nano-system: opportunities and pitfalls

French P., Delft University of Technology, NL

Scaling down has revealed many new effects leading to new devices able to measure faster and more accurately than traditional devices. They also present challenges in terms of connecting to the macro-world and in reliability. [...]

A Unified Parameter Extraction Procedure for Scalable Bipolar Transistor Model Mextram

Wu H.C., Mijalkovic S., Burghartz J.N., Delft University of Technology, NL

A unified parameters extraction procedure for temperature and geometry scalable bipolar transistor model Mextram has been demonstrated using an example of high-speed SiGe HBT technology. The essential feature of the proposed methodology is a direct [...]

Efficient Generation of Reduced-Order Circuit and Device Models for Wide Frequency Applications

Mijalkovic S., Wu H.C., Delft University of Technology, NL

An attractive approach to enjoy the accuracy of calibrated physical device models in the circuit design, without computational burdens is the reduced-order modeling (ROM). ROM aims at capturing the most important features of the detailed [...]

Analytical Model for the Pull-in Time of Low-Q MEMS Devices

Rocha L.A., Cretu E., Wollfenbuttel R.F., Delft University of Technology, NL

A meta-stable transient region just beyond pull-in displacement that ultimately governs the pull-in time in critically damped systems is identified in this paper. Since the pull-in displacement time is basically governed by this second region [...]

A Full-System Dynamic Model for Complex MEMS Structures

Rocha L.A., Cretu E., Wollfenbuttel R.F., Delft University of Technology, NL

For full characterization of a surface micromachined MEMS device, where the thickness of the moving layer is just a few times the gap size, the modeling has to take large-signal behavior and end effects into [...]

Integrated High Frequency RF Inductors with Nano/micro Patterned Ferromagnetic Cores

Zhuang Y., Vroubel M., Rejaei B., Burghartz J.N., Delft University of Technology, NL

Integration of magnetic material has been long proposed to potentially improve performance and shrink size of on-chip inductive RF/microwave components, e.g. inductors, transformers, and transmission lines, which is crucial for the development of cost-effective RF/BiCMOS [...]