This paper discusses a simple phenomenological model of squeeze-film gas damping which has been applied to the design of micromachined optical modulators operating at speeds in excess of 12Mbits/sec. The model is described by analytic expressions and does not rely on the Reynolds or Navier-Stokes equations. It shows, in particular, that to prevent ringing following a step change in driving force, devices intended to operate at speeds greater than a few Mbits/sec must be packaged at elevated gas pressure. Comparisons are made with experimental data.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 589 - 592
Industry sector: Sensors, MEMS, Electronics
Topicss: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications