This paper describes a 3-D finite element modeling scheme for the designing and analysis of a powerful variable ñ reluctance (VR) microactuator. The device to be modeled having the basic principles of operation of reluctance machine. A detailed description of the VR microactuator model is presented. The current design and operational principles are outlined in this paper, also simulation results are presented to demonstrate the output force characteristics of the actuator.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 648 - 650
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications