Simulation and Optimization of Variable Capacitance (VC) Micromotors, Using Modified Parallel-Plate Model

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This paper presents a new approach for finding the optimal configuration and geometrical dimensions of very small variable capacitance (VC) side drive micromotors based on a modified parallel plate capacitance model The electrostatic drive torque, and friction drag torque terms are estimated by using this proposed model. The effect of all micromotor geometric variations on these terms will be discussed, in order to find the highest average output torque with minimum torque ripple, and minimum frictional torque to determine the optimal operational micromotor. Using a modified parallel-plate model a large number of designs can be easily simulated, for different geometric variations and pole configurations. In this model simple analytic calculations are employed, taking into account the side effects of both stator and rotor poles, to include the effect of rotor-stator fringing fields in actual estimation of total equivalent capacitance in this plane, which leads to fast and accurate estimations

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 609 - 612
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9666135-4-6