Modeling and Design Optimization of a CMOS Compatible MEMS

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Silicon etching at low temperature offers the possibility of manufacturing monolithic sensors with associated electronics. For a given technology, the so-called FSBM, we have established a set of relations to describe the mechanical behavior of an elementary device, the cantilever beam. We have then used these relationships for the performance evaluation and optimization of a magnetic field sensor based on the Lorentz force actuation of a ´ U-shape ª cantilever beam.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 620 - 623
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9666135-4-6