Results of the analysis and modelling of a pendulum type of accelerometer in an electrostatic field are presented. A common-mode voltage is used to yield an electrostatic positive feedback that amplifies the mechanical sensitivity. The externally applied electrostatic field enables the tuning of both sensitivity and spectral selectivity. The electromechanical coupling is analyzed both analytically and numerically, in terms of electrostatic shear forces and bending momenta. The results are used to design and fabricate accelerometers for mechanical spectrum analysis.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 601 - 604
Industry sector: Sensors, MEMS, Electronics
Topicss: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications