System Level Modeling of MEMS – TechConnect Briefs

Modeling, Simulation and Design of Piezoelectric Micro-Hydraulic Transducer Devices

Yaglioglu O., Su Y.H., Roberts D.C., Carretero J., Hagood N.W., Massachusetts Institute of Technology, US

This paper reports on modeling, simulation and design considerations for piezoelectric Micro-Hydraulic Transducer (MHT) systems, focusing on power generation applications. Since these devices are complex fluid and structural systems, comprehensive simulation tools are needed for [...]

Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators

Sattler R., Schrag G., Wachutka G., Münich University of Technology, DE

We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which enables the inclusion of damping effects in system level models of entire microsystems in a natural, physical-based, and flexible [...]

Improving Trajectory Piecewise-Linear Approach to Nonlinear Model Order Reduction for Microm䁡chined Devices Using an Aggregated Projection Basis

Rewienski M., White J.K., Massachusetts Institute of Technology, US

In this paper we present an improved algorithm for nonlinear model order reduction (MOR) based on the trajectory piecewise-linear method proposed in [6] which, as shown before, provides an e ective and eÆcient strategy for [...]

Integrated Modeling of Optical MEMS Subsystems

Stoll R., Plowman T., Winick D., Morris A., Coventor, US

This paper presents top-down holistic design and verification of a MEMS-based 3-D optical switching subsystem utilizing an integrated CAD environment. The subsystem design takes place in a nodal simulation environment that includes models for fibers, [...]

Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS

Jing Q., Mukherjee T., Fedder G.K., Carnegie Mellon University, US

MEMS design in NODAS is based on a geometrically intuitive schematic representation of MEMS using a small set of atomic elements (anchors, beams, plates and electrostatic gaps), each of which is associated with a geometrically [...]

Integrated Hierarchical Design of Microelectrofluidic Systems using SystemC

Zhang T., Chakrabarty K., Fair R.B., Cadence Design Systems, Inc., US

This paper describes the role of SystemC in developing an integrated modeling and simulatio environment for microelectrofluidic systems (MEFS). Based on the unique modeling and simulation needs for MEFS, we examine suitability of several existing [...]

Behavioral Modeling of a Humidity Sensor Using an Analog Hardware Description Language

Tételin A., Lévi H., Mongellaz B., Pellet C., Laboratoire IXL, FR

Measuring relative humidity in breath is useful for diagnosing pulmonary diseases. Humidity capacitive sensors were developed to equip a portable clinical device. Simulation is needed to design an electronic interface circuit to be integrated on [...]

Nonlinear Analytical Reduced-Order Models for MEMS

Westby E.R., Fjeldly T.A., Norwegian University of Science and Technology, NO

We present a method for constructing a nonlinear, analytical, reduced-order model for MEMS-structures. The method is based on the center manifold approach for describing nonlinear modes of mechanical systems, in combination with techniques for predicting [...]

Noise Considerations for Closed Loop Digital Accelerometers

Gaura E., Kraft M., Coventry University, UK

This paper investigates the noise shaping properties of a sigma-delta modulator type control system applied to a micromachined accelerometer. Three noise sources are present in such an electromechanical closed loop system: mechanical noise due to [...]

Coupled-Energy-Domain Macromodeling of MEMS Devices

Casinovi G., Georgia Institute of Technology, US

This paper describes a systematic approach to the development of multi-energy-domain macromodels of MEMS devices. This approach is based on a particular form of the coupled algebraic-differential equations describing the dynamics of the device. All [...]

Micromechanical Pierce Oscillator for Resonant Sensing Applications

Seshia A.A., Low W., Bhave S.A., Howe R.T., Montague S., University of California, US

We present the design techniques and experimental characterization of a Pierce oscillator circuit adapted for micromechanical elements with resonant frequencies lying between 100 and 300 kHz. Micromechanical double-ended tuning fork resonators serve as the crystal [...]

Static Equivalent Circuit Model for a Capacitive MEMS RF Switch

Tinttunen T., Veijola T., Nieminen H., Ermolov V., Ryhanen T., Helsinki University of Technology, FI

A simulation model for static analysis of a doubly supported capacitive MEMS RF switch has been constructed using electrical equivalencies. Energy-conserving large-displacement macro models for beam deflection, gap capacitance, electrostatic force, and mechanical contact are [...]

Simulation of a Micro Dispenser Using Lumped Models

Koltay P., Moosmann C., Litterst C., Streule W., Zengerle R., University of Freiburg, DE

In this paper the modelling of a micro dispenser by system simulations according to fluidic network theory is reported. The dispensing device under consideration (the so called “Nano-Jet” dispenser) is described in detail in [1]. [...]

Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems

Tas N.R., Lammerink T.S.J., Berenschot J.W., Elwenspoek M.C., van den Berg A., University of TWente, NL

This paper presents a lumped network approach for the modelling and design of micro-hydraulic systems. A hydraulic oscillator has been built consisting of hydraulic resistors, capacitors and transistors (pressure controlled valves). The scaling of micro-hydraulic [...]

Macromodel Extraction of Gas Damping Effects for Perforated Surfaces with Arbitrarily-Shaped Geometries

Yang Y-J, Yu C-J, National Taiwan University, TW

In this work, we present an application of an Arnoldi-based model order reduction (MOR) technique on squeezed-film damping (SQFD) effects for arbitrarily-shaped perforated geometries. The compact models generated by this approach not only can be [...]

Dispersion Modeling in Microfluidic Channels for System-level Optimization

Baidya B., Mukherjee T., Hoburg J.F., Carnegie Mellon University, US

Chip-based microfluidic separation systems often use serpentine channels to achieve long separation lengths in minimal area. Such designs suffer from the ‘racetrack’ effect due to the bends in the microchannel. In addition, the skew produced [...]

Simulation of Manufacturing Variations in a Z-axis CMOS-MEMS Gyroscope

Iyer S., Mukherjee T., Carnegie Mellon University, US

This paper uses MEMS circuit-level simulation to correlate gyro performance measures such as zero rate output (ZRO), linear acceleration sensitivity (Sa) and cross-axis sensitivity (Sca) to geometrical asymmetries. Elastic and electrostatic asymmetries in the gyroscope [...]

Time-Domain Reduced-Order Models of Lateral Viscous Damping Effects for 3-D Geometries

Yen P-C, Yang Y-J, National Taiwan University, TW

A methodology of generating time-domain reduced-order models of viscous lateral damping effects for microsystems is presented. A three-dimensional finite-difference-method (FDM) Stokes flow solver was developed and verified. The system matrices generate by the solver were [...]

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