This paper describes a systematic approach to the development of multi-energy-domain macromodels of MEMS devices. This approach is based on a particular form of the coupled algebraic-differential equations describing the dynamics of the device. All the model variables retain their physical meaning, which makes it easier to relate the model to the physics of the device it represents. The models can be easily built into a simulator using their associated stamps, thus improving their computational efficiency, compared to models written in hardware description languages. As a concrete example, the model of an electrostatic wobble motor is described, and numerical results obtained from its simulation are presented.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 158 - 161
Industry sector: Sensors, MEMS, Electronics
Topicss: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems