In this work, we present an application of an Arnoldi-based model order reduction (MOR) technique on squeezed-film damping (SQFD) effects for arbitrarily-shaped perforated geometries. The compact models generated by this approach not only can be easily inserted into a system-level modeling package for transient and frequency analysis, but also accounts for the effect of flow impedance of each perforation. The simulated results of the reduced models show good agreement with the experimental results. We also demonstrated that this approach is at least 100 times faster than previous works on perforated SQFD damping simulation.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 178 - 181
Industry sector: Sensors, MEMS, Electronics
Topicss: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems