### Analytic Damping Model for a Square Perforation Cell

A compact model for a square perforation cell is derived. It is generated both analytically and with 3D FEM simulations of the structure. The model consists of six flow resistances, whose values are simple functions [...]

### A Method for Solving Arbitrary MEMS Perforation Problems with Edge and Rare Gas Effects

We present an accurate and fast method solving arbitrary perforation problems utilizing a solver for an extended modified Reynolds equation, the Local Impedance Reynolds (LIR) solver. The extension includes an additional term in the Reynolds [...]

### Extending the Validity of Existing Squeezed-Film Damper Models with Elongations of Surface Dimensions

Border flow effects in squeezed-film dampers having a gap separation comparable with the surface dimensions are studied with 2D and 3D FEM simulations and with analytic models derived from the linearized Reynolds equation for small [...]

### Model for Flow Resistance of a Rare Gas Accounting for Surface Roughness

The contribution of surface roughness is included in the flow resistance of rare gas flow channels. The statistical properties of the surface are taken into account in the model applying a novel approximation for the [...]

### Hierarchical Finite Element Simulation of Perforated Plates with Arbitrary Hole Geometries

The squeezed-film-damping of micro-electro-mechanical devices may be reduced by creating a number of small holes into the structure. Unfortunately, in the simulation of the devices it is possible to consider only a few holes in [...]

### Static Equivalent Circuit Model for a Capacitive MEMS RF Switch

A simulation model for static analysis of a doubly supported capacitive MEMS RF switch has been constructed using electrical equivalencies. Energy-conserving large-displacement macro models for beam deflection, gap capacitance, electrostatic force, and mechanical contact are [...]

### End Effects of Rare Gas Flow in Short Channels and in Squeezed-Film Dampers

Simple approximate design formulas (+-5%) for calculating the elongation of the idealized viscous flow channel of rare gas at Knudsen numbers Kn < 100 due to the open end effects. Rectangular channels with a large [...]

### Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels

Acoustic impedance models for gas flow in rectangular channels are presented. The models include the effect of slightly rarefied gas (slip-flow region) and the fluid inertia effects. An equivalent circuit is presented that implements the [...]

### Compact Model for the Squeezed-Film Damping Including the Open Border Effects

A numerical model for the squeezed-film damping between moving rigid, rectangular surfaces is presented. The emphasis is on the nontrivial boundary conditions for the flow, accounting for the finite acoustic impedance of the surrounding gas [...]

### Compact Damping Models for Lateral Structures Including Gas Rarefaction Effects

Compact models for the viscous damping coefficient in narrow air gaps between laterally moving structures are reported. The gas rarefaction effects are included in these small-displacement models. In the first part of the paper, a [...]