We present a method for constructing a nonlinear, analytical, reduced-order model for MEMS-structures. The method is based on the center manifold approach for describing nonlinear modes of mechanical systems, in combination with techniques for predicting eigenvalues and eigenvectors. When considering a given mode of the mechanical system, this method, unlike modal truncation procedures, takes into account the effects of nonlinearities of the non-modeled modes. Here we present the details of the method and demonstrate its capabilities by applying it to an accelerometer-structure.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 150 - 153
Industry sector: Sensors, MEMS, Electronics
Topicss: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems