Static Equivalent Circuit Model for a Capacitive MEMS RF Switch
Ermolov V., Nieminen H., Ryhanen T., Tinttunen T., Veijola T., Helsinki University of Technology, FI
A simulation model for static analysis of a doubly supported capacitive MEMS RF switch has been constructed using electrical equivalencies. Energy-conserving large-displacement macro models for beam deflection, gap capacitance, electrostatic force, and mechanical contact are [...]