Measuring relative humidity in breath is useful for diagnosing pulmonary diseases. Humidity capacitive sensors were developed to equip a portable clinical device. Simulation is needed to design an electronic interface circuit to be integrated on the same chip as the sensors. A behavioral model of one of these sensors is set out in this paper. It is designed to be included in the model of the microsystem-to-be. It is based on experimental results on the static and dynamic responses of the sensor to humidity and temperature changes. Simulation results fit experimental data with an error inferior to 1%. The model is an illustration of VHDL-AMS capabilities as a modeling language to describe physical phenomena. The method of modeling can be extended to other kinds of sensors. Including the model in a simple microsystem model provides encouraging results.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 146 - 149
Industry sector: Sensors, MEMS, Electronics
Topicss: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems