Modeling plays an essential role in our research on new inkjet technologies. Structural modeling with Ansys includes piezo-electricity. Acoustic modeling in Ansys and Matlab involves fluid-structure interaction. CFD modeling with Flow3D includes wall-flexibility and free [...]
Electrostatically actuated, cantilever-style, metal contact, radio frequency (RF), microelectromechanical systems (MEMS) switches depend on having adequate contact force to achieve desired, low contact resistance. In this study, contact force equations that account for beam tip [...]
The electromechanical buckling of a pre-stressed layer bonded to an elastic foundation is analyzed. A new analytic solution of the mechanical post-buckling is presented. In addition, it is shown that electrostatic forces can precipitately instigate [...]
This paper reports on a three-dimensional simulation of a commercial, thermally actuated bubble jet printhead using an appropriate pressure boundary condition for the bubble nucleation and expansion. The ink jet system has been used as [...]
A combined circuit-device model for the analysis of integrated microfluidic system is presented. The complete model of an integrated microfluidic device incorporates modeling of the fluidic transport, chemical reaction, reagent mixing and separation. The microfluidic [...]
Border flow effects in squeezed-film dampers having a gap separation comparable with the surface dimensions are studied with 2D and 3D FEM simulations and with analytic models derived from the linearized Reynolds equation for small [...]
The surface micromachining processes used to manufacture MEMS devices and integrated circuits transpire at such small length scales and are sufficiently complex that theoretical analysis of them is particularly inviting. Under development at Sandia National [...]
We propose a mixed-level simulation scheme for squeeze film damping effects in microdevices, which makes it possible to include damping effects in system-level models of entire microsystems in a natural, physically-based and flexible way. Our [...]
We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law [...]
We present a model for the dynamic behavior of microplates under the coupled effects of squeeze-film damping, electrostatic actuation, and mechanical forces. The model simulates the dynamics of microplates and predicts their quality factors under [...]
We present a model and analytical expressions for the quality factors of microplates due to thermoelastic damping. We solve the heat equation for the thermal current across the thickness of a microplate, and hence decouple [...]
This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor [...]
Electrically heated, thermally driven, surface micromachined polysilicon beam flexure thermal actuators have been investigated using analytical methods that employ constant material properties either taken at room temperature or based on a set of averaged temperatures [...]
The constitutive equations of multi-layered piezoelectric structures are derived in a new form. In this form, the electromechanical coupling is presented as an additional stiffness matrix. This matrix is a true property of the piezoelectric [...]
A meta-stable transient region just beyond pull-in displacement that ultimately governs the pull-in time in critically damped systems is identified in this paper. Since the pull-in displacement time is basically governed by this second region [...]
We present an approach to the design of electrostatically-actuated micro-structures and discuss its implementation in a software tool called IDEA. The main advantage of this approach is that it considerably reduces problems associated to coupling [...]
Model reduction of linear large-scale dynamic systems is already quite an established area –. In a number of papers (see references in ), the advantages of model reduction have been demonstrated. In the present paper, [...]
We present a new approach to the simulation of uncertainties in micro-electromechanical systems, based on the same principle as perturbation methods. This approach is valid for large variations of the uncertainties and requires much less [...]
We present a dynamic analysis of a novel RF MEMS switch utilizing the dynamic pull-in phenomenon. We study this phenomenon and present guidelines about its mechanism. We propose to utilize this phenomenon to design a [...]
To accelerate MEMS design for surface micromachining applications, an algorithm and associated design tool have been created which translates designers’ 3D models into 2D lithographic production masks. Typically, designing a surface micromachined, MEMS device requires [...]
MEMS based mechanical resonators and filters have shown promising characteristics in achieving high Q values and good stability. This paper introduces a novel V-shape coupling element that is used to mechanically couple two clamped-clamped MEMS [...]
We present a new electro-thermal microactuator to have multi-lateral motion in plane by only varying voltage potentials at the contact pads. To extend the operating function, the larger operating range or multi-mode switch, relay and [...]
Modeling and simulation of the behavior of a system consisting of many single devices is an essential requirement for the reduction of design cycles in the development of microsystem applications. Analytic solutions for the describing [...]
It is well known that modeling 3-D lateral viscous damping effects requires considerable computational resources. Therefore, earlier works on lateral viscous damping were based on the 1-D analytical Stokes and Couette flow solutions [1,2]. Recently, [...]
Traditional modeling work in MEMS includes simplified PDE/ODE formulation, based on physical principles, and Finite Element Analysis. More recently, reduced order modeling techniques using Krylov subspace decomposition have been proposed in the context of nodal [...]
In this paper we show that the dynamic performance of MEMS devices can be significantly enhanced using reduced-order modeling techniques and open-loop control via input shaping. Specifically, we apply this methodology to a variety of [...]
Geometric modeling is an important aspect of MEMS design. It not only creates geometric model for visual evaluation, but also supplies input for device performance analysis. This paper focuses on developing a feature-based geometric design [...]
Increased functionality of microelectromechanical systems (MEMS) has lead to the development of micro-scale devices that are geometrically complex. These complex configurations require the development of new and more efficient finite element (FE) techniques for modeling [...]
An interdigitated design for MEMS RF-switches is applied to both a shunt and a series ohmic contact configuration. Interdigitated Al-Ti-TiN RF-signal paths and poly actuation electrodes are arranged underneath an electrodeposited gold plate, suspended by [...]
The present work deals with the optimization of a compliant force amplifier mechanism in a surface micromachined resonant accelerometer. Figures of merit including noise floor and scale factor are critically dependent on the gain of [...]
Analytical models are presented to describe the resonant modal coupling behaviour of z-axis micromechanical vibratory rate gyroscopes fabricated in an integrated polysilicon surface micromachining process. The models are then applied to predict the extent of [...]
An effective description and an accurate understanding of any pumping mechanism is critical, especially of the micro scale. With the existence of a comprehensive and adaptable model, accurate preproduction predictions of performance are realized. Optimal [...]
A novel approach to identify nonproportional damping and structural anisoelasticities in vibratory MEMS gyroscopes is proposed in this paper. The proposed identification method is based on measured vibration data in the form of frequency response [...]
Predicting air damping on micromachined mechanical resonators is crucial in the design of high-performance filters used in wireless communication systems. In the past, most of the work focused on devices with minimum feature size on [...]
This paper presents a simulation of a bridge-type resonating beam connected to the tube loop structure of a Coriolis true mass flow sensor. The resonant beam technique, which is comparable to optical, piezoresistive, and capacitive [...]
In this paper we demonstrate the capabilities of our system-level CAD tool, Chatoyant, to model and simulate an RF MEMS switch. Chatoyant is a mixed signal, multi-domain CAD tool that can be used to design [...]
A mono-dimensional model of an over heated actuator is presented in this paper. The proposed distributed models are derived based on real physical phenomena described by multi-dimensional partial differential equations. The proposed model has been [...]
, Reynolds-Brown P.
, Blum Spahn O.
, Harris J.
, Novak E.
, Wong C.C.
, Mani S.
, Peter F.
, Adams D.
, Sandia National Laboratories, US
A two-position micro-optical switch is being developed at Sandia National Laboratories. This MEMS device is shown in Figure 1 as a gear with a through-hole; the actuation mechanism is not shown. In the "on" position, [...]
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: March 7, 2004
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications