Dynamic Modeling and Input Shaping for MEMS

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In this paper we show that the dynamic performance of MEMS devices can be significantly enhanced using reduced-order modeling techniques and open-loop control via input shaping. Specifically, we apply this methodology to a variety of thermally and electrostatically actuated microstructures, extending our recent results presented in [1]. Input shaping is a popular open-loop control method used primarily for vibration reduction in high precision and high speed positioning equipment [2]. This approach is particularly well suited in applications where positioning feedback signals are not available, and therefore it is very relevant for MEMS.

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Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: March 7, 2004
Pages: 315 - 318
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-8-4