Computationally Efficient Dynamic Modeling of MEMS
Anderson K.S., Critchley J., Popa D.O., Sadowski M., Skidmore G., Rensselaer Polytechnic Institute, US
Traditional modeling work in MEMS includes simplified PDE/ODE formulation, based on physical principles, and Finite Element Analysis. More recently, reduced order modeling techniques using Krylov subspace decomposition have been proposed in the context of nodal [...]