We present an approach to the design of electrostatically-actuated micro-structures and discuss its implementation in a software tool called IDEA. The main advantage of this approach is that it considerably reduces problems associated to coupling and to large-displacement non-linearities. The results obtained with IDEA are then compared with ANSYS simulations of an electrostatic micro-mirror.
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: March 7, 2004
Pages: 275 - 278
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications