Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator

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We present an approach to the design of electrostatically-actuated micro-structures and discuss its implementation in a software tool called IDEA. The main advantage of this approach is that it considerably reduces problems associated to coupling and to large-displacement non-linearities. The results obtained with IDEA are then compared with ANSYS simulations of an electrostatic micro-mirror.

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Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: March 7, 2004
Pages: 275 - 278
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-8-4