Papers:
Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope
We present a method for the calculation of the coefficients of cubic stiffening for tether-suspended micromachined systems. The analysis is based on a nonlinear rod theory, and enables the prediction of the maximum achievable motion [...]
Coupled Electrostatic-Structures-Fluidic Analysis of a Micromirror
For micromirrors used in optical MEMS, in addition to the static displacement-voltage characteristics, the accurate transient characterization of these devices is becoming increasingly important. The latter one is strongly affected by the viscous damping
Performance Limits of Micromachined Tunable-Cavity Filter
This paper focuses on the performance limits of a tunable-cavity Fabry-Perot filter (FPF)implemented using MEMS technology.This is a versatile device capable of many functions,including light modulation and high precision sensing.Our goal is to explore challenges [...]
Simulation of Shape Memory Devices with Coupled Finite Element Programs
This paper presents thermal and mechanical calculations on micro devices driven by electrical heating of a shape memory alloy (SMA). For simulation a program packages has been developed to allow coupling of single task Finite [...]
Modeling a High Power Density MEMS Magnetic Induction Machine
Most micro-scale electric and magnetic machines studied in the last decade lack the power density to support many practical applications. The magnetic induction machine reported here attempts to transcend this practicality barrier by offering power [...]
Multiple Solutions in Electrostatic MEMS
The pull-in voltage instability is the principle phenomena limiting the design of nearly every electrostatically actuated MEMS device. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer [...]
Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA
This paper is devoted to a study on a new metallic microresonator realized by UV-LIGA technique. This device is excited electrostatically and takes advantage of the contour modes or Lamé-modes of the structure. Design methods [...]
Thermal Frequency Drift of Resonant Microsensor
Shen F., Lu P., O'Shea S.J., Lee K.H., Pradhan S.C., Ng T.Y., Institute for High Performance Computing, SG
Thermal effects on the resonant frequency drift of a microsensor (a silicon cantilever beam with a gold coating) are studied. Two cases are investigated using analytical methods: uniform temperature distribution and linear temperature distribution along [...]
Vibration Analysis of Quartz Yaw-Rate Sensor to Reduce Mechanical Coupling
Fujiyoishi M., Nononmura Y., Omura Y., Tsukada K., Matsushige S., Kurata N., Toyota Central R&D Labs, JP
For a yaw-rate sensor (gyroscope), the reduction of mechanical coupling phenomenon is a key technology for achieving high performance. We analyze the phenomenon with a combination of two models, (1) a static model of a [...]
Modeling and Analysis of Hysteresis Phenomena in Electrostatic Zipper Actuators
We investigate the relationship between the pull-in phenomenon for electrostatic actuators and the hysteresis effect found in zipper actuators. Liked lumped mass and spring and tension based membrane models, we show that a beam model [...]
Surface Chemistry Effects in Finite Element Modeling of Heat Transfer in µ-fuel Cells
Equations for modeling surface chemical kinetics by the interaction of gaseous and surface species are presented. The formulation is embedded in a finite element heat transfer code and an ordinary differential equation package is used [...]
The Applicability of Temperature Correction to Chemoresistive Sensors in an e-NOSE-ANN System
The influence of the temperature sensitivity of chemoresistive, inherently-conductive-polymer (ICP) sensors on the performance of an artificial neural network (ANN) e-NOSE system is evaluated. Temperature was found to strongly influence the responses of t
Electromechanical and Microwave S-parameter Properties of a Wide Tuning Range MEMS Tunable Capacitor
We present the electromechanical and microwave properties of a novel micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this novel tunable capacitor consists of one suspended top plate [...]
Development of Patterned SMA Strips as Self-Heating Resistors
A way to develop the pattern of shape memory alloys (SMA) titanium-nickel (TiNi) strips for improving the actuation performance of membrane microactuator is described in this paper. The patterned SMA strips serve not only as [...]
Effects of Slider-Driven Piezo-Microactuator Placements and Profiles on HGA Sway Mode
With areal recording density of hard disk drives (HDD) historically growing at an average of 60% per year, it is becoming increasingly more difficult to maintain the precise positioning required of the ever-smaller GMR heads [...]
Modeling and Simulation of THUNDER Actuators Using ANSYS Finite Element Analysis
The use of a quarter-symmetry three-dimensional finite element analysis model in predicting the behavior of the laminated piezoceramic material device known as THUNDER actuators is investigated. The analyses simulating the fabrication process and subsequ
Modeling and Dynamic Simulation of Electrostatically Driven Micromirror
Dynamic behavior of the electrostatically driven bi-directional micromirror system was simulated with ANSYS parametric design language. The objective of the study is to construct a dynamic simulation scheme for the transient properties of electrostatically coupled [...]
A Novel Polymer Nanofiber Interface for Chemical and Biochemical Sensor Applications
Polymer thin films are used extensively as a chemically sensing medium in variety types of acoustic sensors. It is well known that the sensitivity of a sensing film is proportional to the surface area of [...]
On the Utility of Airborne MEMS for Improving Meteorological Analysis and Forecasting
Among the applications envisioned for Micro ElectroMechanical Systems (MEMS) sensors are weather observations from probes that are suspended in the atmosphere and carried by wind currents. This paper describes preliminary experiments with a state-of-the-science numerical [...]
MEMS Simulation in Heavily Doped Silicon Devices
Simulation of the semiconductor transport under heavily doped and stressed conditions is presented. The degenerate statistics are introduced by taking into account the density-of-state functions for the band tail and the impurity band. The momentum-dependent [...]
Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives
The modeling and simulation of a single crystal silicon microactuator for high-density hard disk drives are described in this paper. The microactuator is fabricated by LISA process, which has an electrically isolated structure directly from [...]
Study of a Novel Isotropic Suspension Design for an Angular Gyroscope
This paper describes the analysis of a novel isotropic suspension designed for use in a Micro Electro Mechanical System (MEMS) z-axis angular gyroscope.The suspension,consisting of six concentric interconnected rings rigidly attached to an anchored frame,supports [...]
A Simple and Scalable Model for Spiral Inductors on Silicon
Sia C.B., Yeo K.S., Goh W.L., Swe T.N., Ma J.G., Do M.A., Lin J.S., Chan L., Nanyang Technological University, US
A new, simple and scalable inductor model for silicon-based spiral inductors has been presented in this paper. Compared to the conventional model, it can predict accurately the inductive characteristics and quality factor for inductors of [...]
An Accurate Photodiode Model for DC and High Frequency SPICE Circuit Simulation
An accurate photodiode model for DC as well as high frequency SPICE circuit simulation is presented in this paper. The accuracy of the proposed model is verified with the measured data obtained from two different [...]
Investigation into the Standardization of Micromechanical Components and their Simulation and Computation Using FEM — Case Study of Diaphragms
Although certain components (such as diaphragms or beams) are used recurrently in micromechanics, the degree of standardization of components that is familiear in classic mechanical engineering is still to a great extent unknown in this [...]
Thermal Modeling of a Surface-micromachined Linear Thermomechanical Actuator
The thermal behavior of a thermomechanical in-plane microactuator is modeled using a finite-difference approach. Steady-state temperature profiles from the model are presented for a microactuator operating in air and a vacuum. The model is validated [...]
Modeling the Effects of Joint Clearances in Planar Micromechanisms
Surface micromachining of micro-electro-mechanical systems (MEMS) has inherent limitations that can lead to mechanisms having an undesirable amount of clearance in revolute and prismatic joints. In micro devices, where actua-tion of the mechanisms is often [...]
Eigenvalue Analysis of Tunable Micro-mechanical Actuator
An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the [...]
Modeling and Simulation on Two Passive Feedback Methods to Obtain Large Travel Range of Electrostatic Micro Mirrors
This paper demonstrates two passive feedback methods to obtain increased travel range in electrostatic micro actuators directly in the electrostatic domain. The first method is modeled as a series capacitor loop in which an integrated [...]
Finite Element Analysis in the Development of MEMS-based Compound Grating (MCG)
This paper presents the development of the 1 mm ruled MEMS-based Compound Grating (MCG) in which the structural material of the rulings is SiO2 coated with Cr/Au as the top electrode. The MEMS simulation package [...]
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-0-4