Finite Element Analysis in the Development of MEMS-based Compound Grating (MCG)

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This paper presents the development of the 1 mm ruled MEMS-based Compound Grating (MCG) in which the structural material of the rulings is SiO2 coated with Cr/Au as the top electrode. The MEMS simulation package IntelliSuiteTM is used to determine the structural dimensions and to study the electrical actuation property. Four different versions of MCGs are studied. The lengths of the rulings vary from 100 mm to 150 mm. Using Finite Element Analysis, the structural integrity is examined and the electrical actuation properties are predicted. Finally, the device prototypes are successfully fabricated and initial experimental results are compared with the simulation results.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 386 - 389
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-0-4