Thermal Modeling of a Surface-micromachined Linear Thermomechanical Actuator

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The thermal behavior of a thermomechanical in-plane microactuator is modeled using a finite-difference approach. Steady-state temperature profiles from the model are presented for a microactuator operating in air and a vacuum. The model is validated by comparing the actuator displacements predicted by the model with those obtained experimentally. Initial results demonstrate significant improvements in the steady-state efficiency of the microactuator when it is operated in a vacuum.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 370 - 373
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-0-4