Pisano A.P. – TechConnect Briefs

Silver Precipitation in Energy-Scavenging Aluminum Nitride Resonators

Alleyne F.S., Ford M., Gronsky R., Yen T.-T., Pisano A.P., University of California-Berkeley, US

Despite more than a decade of experience in manufacturing of nanoelectromechanical systems (NEMS) incorporating piezoelectric elements, modern devices are still plagued by delamination at the electrode/piezoelectric interface. Consequently the electric field essential to generate and [...]

Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope

Davis W.O., Pisano A.P., University of California-Berkeley, US

We present a method for the calculation of the coefficients of cubic stiffening for tether-suspended micromachined systems. The analysis is based on a nonlinear rod theory, and enables the prediction of the maximum achievable motion [...]

On the Vibrations of a MEMS Gyroscope

Davis W.O., Pisano A.P., UC-Berkeley, US

In this paper, the dynamics of a dual-axis MEMS gyroscope are examined. The model for the device is based on a non-linear rod theory developed by A. E. Green, P. M. Naghdi and several co-workers. [...]