Modeling and Dynamic Simulation of Electrostatically Driven Micromirror

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Dynamic behavior of the electrostatically driven bi-directional micromirror system was simulated with ANSYS parametric design language. The objective of the study is to construct a dynamic simulation scheme for the transient properties of electrostatically coupled mechanical system. Iterative method between the electrostatic and mechanical analyses with a small increment of time (Dt) was used for this simulation. In the simulation, shell element was used for the structural modeling. Air components using solid elements were added between the bottom electrodes and mirror plate for the electrostatic force calculation. Comparison between the simulated results and experiment data showed good agreement. Result of this work can be applied to the analysis of electrostatically driven microsystem helping to design more effectively.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 334 - 337
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-0-4