Thermal Frequency Drift of Resonant Microsensor

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Thermal effects on the resonant frequency drift of a microsensor (a silicon cantilever beam with a gold coating) are studied. Two cases are investigated using analytical methods: uniform temperature distribution and linear temperature distribution along the length of the sensor. It is found that the thermal frequency drift is dominated by the temperature-dependent material properties. Thermal frequency drift also depends on the ratio of the thickness of the gold coating and the thickness of the silicon cantilever. The results show that the relationship between thermal frequency drift and the ratio of gold-to-silicon thickenss is nearly linear.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 298 - 301
Industry sector: Sensors, MEMS, Electronics
Topicss: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-0-4