Papers – TechConnect Briefs

Analysis of Realistic Large MEMS Devices

Ljung P., Bächtold M., Spasojevic M., Coyote Systems, Inc., US

A high-speed high-accuracy 3D field solver for the solution of coupled multi-physics encountered in MEMS is presented. The software AutoMEMS enables automatic model generation from layout, automatic meshing, adaptive mesh refinement of large complex geometries [...]

A Computational Framework for Modeling One-Dimensional, Sub-Grid Components and Phenomena in Multi-Dimensional Micro-Systems

Pindera M.Z., Bayyuk S., Upadhya V., Przekwas A.J., CFD Research Corporation, US

This paper presents a framework for modeling essentially one-dimensional devices and components embedded in multi-dimensional spaces. The main characteristic and main advantage of the new methodology is that the one-dimensional and multi-dimensional objects or domains [...]

Modified Nodal Analysis for MEMS with Multi-Energy Domains

Clark J.V., Zhou N., Pister K.S.J., University of California at Berkeley, US

A modified nodal analysis approach for the design, simulation, and display of three-dimensional microelectro-mechanical systems with coupled energy domains is presented. Static, steady-state, and transient algorithms are introduced followed by examples. Transient and static analysis [...]

Numerical Simulation of Micro Assembly Techniques in MEMS Devices

Finch N., Keating D., He Y., IntelliSense Corporation, US

This paper presents research on numerical simulation of the micro-assembly of MEMS devices. Recent developments in MEMS devices ñ making use of multiple deposition layers, micro-fabricated hinges, and actuators ñ have enabled fabrication of MEMS [...]

GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS

Wilson N., Wang K., Yergeau D., Dutton R.W., Stanford University, US

This paper will detail the capabilities of a new geometric modeling tool, called Geodesic, which is being released in source code form to the general community. In addition to providing geometric operations to create geometry [...]

CFD-Micromesh: A Fast Geometrical Modeling and Mesh Generation Tool for 3D Microsystem Simulations

Tan Z., Furmanczyk M., Turowski M., Przekwas A.J., CFD Research Corporation, US

In this work, a new fully automated geometrical modeling and meshing tool is described. It imports standard layout formats (CIF, GDSII, DXF), images (GIF, JPG), and 3D boundary representations (STL). A 3D model is then [...]

Quality Based Design and Design for Reliability of Micro Electro Mechanical Systems (MEMS) Using Probabilistic Methods

Reh S., Lethbridge P., Ostergaard D.F., ANSYS, Inc., US

The paper demonstrates the use of probabilistic methods to assess the electromechanical behavior of micro electromechanical systems (MEMS) under the presence of micromachining manufacturing and process uncertainties. Probabilistic Methods are used to assess uncertainties involved [...]

High-Fidelity and Reduced Models of Synthetic Microjets

Przekwas A.J., Turowski M., Chen Z., CFD Research Corporation, US

Microfabricated arrays of synthetic jets are being explored for applications in aerodynamic flow control, in cooling of electronic packages, and in mixing in microchemical reactors. Computational simulation of coupled unsteady fluid mechanics and electromechanical actuation [...]

Wafer Fabrication Process Simulation Including Cost: Which Should be Used in an In-Line Wafer Inspection Strategy, High Sensitivity and High Cost Inspection Machine or Low Sensitivity and Low Cost Inspection Machine?

Nakamae K., Yamaji S., Fujioka H., Osaka University, JP

By combing an event-driven simulation method including costs and a simple VLSI particle-induced yield predictor, we discuss that which should be used in an in-line wafer inspection strategy, a high sensitivity & high cost inspection [...]

3D MEMS Design via Matlab Interactive Plots

Lo N.R., Pister K.S.J., University of California, US

Matlab is utilized for 3D MEMS design. A preprocessor, written in C, processes the standard, 2D CIF design by applying the topology and spatial information to the design. The Mat3d toolkit then takes the output [...]