Modified Nodal Analysis for MEMS with Multi-Energy Domains

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A modified nodal analysis approach for the design, simulation, and display of three-dimensional microelectro-mechanical systems with coupled energy domains is presented. Static, steady-state, and transient algorithms are introduced followed by examples. Transient and static analysis in noninertial frames is now supported. Simulated results include (1) three-dimensional modal analysis of a torsional micro-mirror, (2) static analysis of a gap-closing actuator with coupled circuit, mechanical, and electrostatic energy domains, (3) the induced current response of a comb-driven multi-mode resonator, and (4) the transient response of a gap-closing actuator due to a time varying voltage showing a nonlinearly varying resonance frequency and displacement.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 723 - 726
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0