Papers – TechConnect Briefs

CAD for Opto-Electronic Microsystems

Kurzweg T.P., Levitan S.P., Marchand P.J., Prough K.R., Chiarulli D.M., University of Pittsburgh, US

The use of MEMs technology has enabled the fabrica-tion of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended [...]

Physically Rigorous Modeling of Sensing Techniques Exploiting the Thermo-Optical and Electro-Optical Effect

Thalhammer R., Hille F., Scheubert P., Wachutka G., Münich University of Technology, DE

The complex refractive index in semiconductors depends on several electrical, thermal, and mechanical state variables, e. g. carrier concentrations, lattice temperature, or mechanical stress. Making use of these dependencies, various internal laser probing techniques and [...]

System-Level Optical Models of 3-D Laser Projection Systems Using Micromirror Arrays

Albrecht J., Seidel R., Melzer L., Müller D., Chemnitz University of Technology, DE

In this paper the development of system-level optical models that can be used e.g. for simulating entire laser projection systems is presented. After a short motivation ray optics as the simplest theory of optics is [...]

Rectilinear Dynamics of Magnetically Driven Microsystems

Kilani M.I., Chen C-J., Haik Y., Pai V., FAMU-FSU College of Engineering, US

The dynamic behavior of magnetically driven microsystems is investigated in this study. An experimental setup designed to simulate the dynamic response of a micro-roller element moving in rectilinear path under influence of an external magnetic [...]

Wavelet Transform Image Compression Prototype

Watkins L., Perry K.R., Hurley J.S., Olson B., Pain B., Clark Atlanta Univeristy, US

In this study, we seek to develop a low power, area efficient wavelet compression chip capable of reconstructing sharp images at acceptable noise levels. It can be used in conjunction with such devices as the [...]

Simulation of a Micro Optical Distance Sensor Realized by the LIGA Process

Guth H., Hellmann A., Sieber I., Eggert H., Mohr J., Nakajima H., Tanimot K., Usami T., Forschungszentrum Karlsruhe GmbH, DE

The aim of the presented work is to simulate and validate an ultra miniaturized optical distance sensor, which works by means of triangulation. The sensor is dedicated for a detection range of 1 to 6mm [...]

Finite Element Modeling of a Microhotplate for Microfluidic Applications

Manginell R.P., Rosato D.A., Benson D.A., Frye-Mason G.C., Sandia National Laboratory, US

A hand-held chemical laboratory (mChemLab) is being developed that utilizes a silicon- nitride-supported microhotplate in the front-end, gas sampling and preconcentration stage. Device constraints include low-power (<200mW at 5V), rapid heating (<20msec), and a relatively [...]

Modeling of the Piezoelectric Micropump for Imporving the Working Parameters

Nedelcu O.T., Moagar-Poladian V., IMT-Bucharest, RO

In this paper a modeling for the flow of viscous liquids and a way to improve the piezoelectric micropump efficiency are described, in order to find the most convenient set of hydraulic parameters. The main [...]

Nanosecond Range Heating and Temperature Measurement on Thin Layers Experiment and Simulation

Moritz W., Roth U., Heyde M., Rademann K., Reichling M., Hartmann J., Humboldt Universitat zu Berlin, DE

A chemical semiconductor sensor for oxygen gas was activated by thermal treatment. The thin Pt layer of the n-Si/SiO2/Si3N4/LaF3/Pt field effect structure was used as the gate electrode for sensitivity measurements, heating resistance and temperature [...]

Development of CAD Model for MEMS Micropumps

Arik M., Zurn S.M., Bar-Cohen A., Nam Y., Markus D., Polla D., Univeristy of Minnesota, US

This paper describes development of a Computer Aided Design Model for MicroElectroMechanical Systems. Finite Element Analyses have been completed successfully to understand the physical nature of the sample MEMS devices. Numerical results have been supported [...]