Simulation of a Micro Optical Distance Sensor Realized by the LIGA Process

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The aim of the presented work is to simulate and validate an ultra miniaturized optical distance sensor, which works by means of triangulation. The sensor is dedicated for a detection range of 1 to 6mm and has been designed by Mitsubishi Electric Corporation and realized in cooper-ated research with the Forschungszentrum Karlsruhe (FZK) [1]. In a first step the structure of a monolithic manufac-tured device is shown. Then the composition of the simu-lation model is described and presented by means of ray-tracing. Simulation results are given as analyzed irradia-tion distributions of the target spots. Further simulation results concern irradiation distribution analyses at the location of the corresponding detection devices. As far as experimental results are available they are compared to the simulated ones.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 667 - 670
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems, Photonic Materials & Devices
ISBN: 0-9666135-4-6