This paper describes development of a Computer Aided Design Model for MicroElectroMechanical Systems. Finite Element Analyses have been completed successfully to understand the physical nature of the sample MEMS devices. Numerical results have been supported by analytical calculations in terms of the displacement, impedance, modular and harmonic analyses. A set of piezoelectrically actuated cantilever beams have been fabricated at the Microtechnology Laboratory of the University of Minnesota. Numerical results well compared with the experimental findings.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 651 - 654
Industry sector: Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip, Modeling & Simulation of Microsystems