The complex refractive index in semiconductors depends on several electrical, thermal, and mechanical state variables, e. g. carrier concentrations, lattice temperature, or mechanical stress. Making use of these dependencies, various internal laser probing techniques and optical microsensors have been proposed. In this work, we present aphysically rigorous simulation strategy for the complete measurement procedure of laser probes, which is equally applicable to optical micro- sensors. It includes a self-consistent electro-thermal device simulation, the calculation of the resulting modulation of the refractive index, and the calculation of the beam propagation through the device under test, the lenses and the aperture holes. As an application example, simulation results for laser de ection measurements are discussed.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 683 - 686
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems, Photonic Materials & Devices