In this paper a modeling for the flow of viscous liquids and a way to improve the piezoelectric micropump efficiency are described, in order to find the most convenient set of hydraulic parameters. The main goal is to characterize the flow rate as function of these parameters and to find the best configuration related to head loss. The considered parameters are inlet and outlet pressures, length of internal channels, frequency of power supply applied on the piezoelectric material, transversal piezoelectric pressure. The important results are: a theoretic model for the flow, an evaluation of flow rate as function of parameters, an analysis for the dependence of head loss and efficiency of micropump as function of most important parameters of the micropump. Also, the behavior of piezoelectrically actuated micro-membrane using analytical solutions and FEM simulation (ANSYS) has been investigated.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 659 - 662
Industry sector: Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip, Modeling & Simulation of Microsystems