The use of MEMs technology has enabled the fabrica-tion of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our free-space opto-electronic system CAD tool, Chatoyant, to meet the needs of optical MEMS designers. This paper presents new analysis tech-niques which extend our tool to support optical MEM sys-tem design. We demonstrate these extensions with the analysis of a 1×2 micro-optical MEM interferometer switch.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 687 - 690
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems, Photonic Materials & Devices