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HomeTopicsModeling & Simulation of Microsystems

Topic: Modeling & Simulation of Microsystems

Fast Fluid Analysis for Multibody Micromachined Devices

Wang X., Mucha P., White J.K., Massachusetts Institute of Technology, US
Recently developed fast integral equation methods for computing solutions to the Stokes' equation have proven to be a valuable tool for micro-machined device designers. The speed of these fast codes make it possible to simulate [...]

Moment-based Analysis of Mechanical Effects on Trench-Hall Devices

Taschini S., Korvink J.G., Baltes H., ETH Zürich, CH
This paper presents a novel method for the assessment of mechanical effects on trench-Hall devices based on a moment expansion combined with two-dimensional finite-element discretization. Analogously to plate theories, a truncated moment expansion of the [...]

Variance Reduction in Monte Carlo Device Simulation by Means of Event Biasing

Kosina H., Nedjalkov M., Selberherr S., Technical University of Vienna, AT
A theoretical analysis of the Monte Carlo (MC) method for the solution of the stationary boundary value problem defined by the Boltzmann equation is briefly outlined. This analysis clearly shows how event biasing can be [...]

Modeling of Ionic Hydrogel Kinetics in Buffered Solutions

Ohs R.R., De S.K., Aluru N.R., University of Illinois at Urbana-Champaign, US
In this paper, we present the meshless Finite Cloud Method (FCM) for the solution of a time-dependent partial differential equation governing ionic gel swelling. Using a point distribution, FCM constructs interpolation functions without assuming any [...]

Numerics, Algorithms

Multiscale Modeling of Microfluidics

Karniadakis G., Brown University, US
Micro-electro-mechanical systems involve complex functions governed by diverse transient physical and electrical processes for each of their many components. This is an example of a coupled-domain simulation, i.e., the simultaneous simulation of different functional units [...]

Towards Predictive TCAD and Fab Integration

Fichtner W., Swiss Federal Institute of Technology, CH
This paper gives an overview of the status of technology computer-aided design (TCAD) as it is used today for research, development and manufacturing projects in the micro- and opto-electronics industry. While the accurate and physics-based [...]

Plenary lectures

Analysis of Realistic Large MEMS Devices

Ljung P., Bächtold M., Spasojevic M., Coyote Systems, Inc., US
A high-speed high-accuracy 3D field solver for the solution of coupled multi-physics encountered in MEMS is presented. The software AutoMEMS enables automatic model generation from layout, automatic meshing, adaptive mesh refinement of large complex geometries [...]

A Computational Framework for Modeling One-Dimensional, Sub-Grid Components and Phenomena in Multi-Dimensional Micro-Systems

Pindera M.Z., Bayyuk S., Upadhya V., Przekwas A.J., CFD Research Corporation, US
This paper presents a framework for modeling essentially one-dimensional devices and components embedded in multi-dimensional spaces. The main characteristic and main advantage of the new methodology is that the one-dimensional and multi-dimensional objects or domains [...]

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