Moment-based Analysis of Mechanical Effects on Trench-Hall Devices

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This paper presents a novel method for the assessment of mechanical effects on trench-Hall devices based on a moment expansion combined with two-dimensional finite-element discretization. Analogously to plate theories, a truncated moment expansion of the equations in the transverse coordinate is used to approximate the three dimensional problem. The resulting limited set of two-dimensional problems is discretized by means of finite-elements. The parametrization of the procedure lends itself to the optimization of the device geometry, therefore representing a valuable tool for the designer.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 15 - 18
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4