Modeling & Simulation of Microsystems – Page 38

The Coupled-Domain System Simulation/Simulatability Problem

Jopling J., Rose D., Fair R.B., Duke University, US

This paper discusses the diculties in current approaches to modeling and simulation of coupled-domain systems and presents new approaches and solutions to simulation execution and the model-simulation gap. The ongoing paradigm shift toward coupled-domain systems [...]

Efficient Simulation of MEMS Using Element Stamps

Casinovi G., Georgia Institute of Technology, US

This paper describes an approach to MEMS simulation based on so-called element stamps, which are the building blocks of conventional circuit simulators. Stamps are derived from lumped-constant models of individual electromechanical devices, and built into [...]

Challenges in CMOS-MEMS Extraction

Baidya B., Mukherjee T., Carnegie Mellon University, US

CMOS micromachining processes are being increasingly used to fabricate integrated MEMS devices. Verification of such designs requires extraction from layout to mixed domain circuits and MEMS schematics for lumped parameter simulation. The higher etch hole [...]

Closed Loop Micromachined Inertial Sensors with Higher Order SD-Modulators

Kraft M., Redman-White W., Mokhtari M.E., University of Southampton, UK

Micromachined inertial sensors are often incorporated in closed loop force feedback structures; a particularly advantageous approach is based upon the inclusion of the sensing element in a sigma-delta modulator (SDM) type control structure. The order [...]

Comparison of Two Novel Control Strategies for a Closed Loop Micromachined Tunnelling Accelerometer

Gaura E., Kraft M., Coventry University, UK

This paper presents system level modelling and simulations results of two closed loop, force-feedback control strategies for micromachined tunnelling accelerometers. The first approach is based on the incorporation of the sensing element in a sigma-delta [...]

Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels

Veijola T., Helsinki University of Technology, FI

Acoustic impedance models for gas flow in rectangular channels are presented. The models include the effect of slightly rarefied gas (slip-flow region) and the fluid inertia effects. An equivalent circuit is presented that implements the [...]

Squeeze Film Damping in Arbitrary Shaped Microdevices Modelled by an Accurate Mixed Level Scheme

Schrag G., Voigt P., Wachutka G., Münich University of Technology, DE

We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which allows for including the damping effects in system-level models of entire microsystems in a natural physical-based way. It also [...]

System Level Modeling

Automatic Generation of Small-Signal Dynamic Macromodels from 3-D Simulation

Ramaswamy D., White J.K., Massachusetts Institute of Technology, US

Recent algorithmic developments have greatly accelerated 3-D simulation of micromachined devices, but simulation and optimization of systems which use those devices require much more easily evaluated, yet still accurate, macromodels. In this paper we focus [...]

Efficient Poisson Equation Solvers for Large Scale 3D Simulations

Speyer G., Vasileska D., Goodnick S.M., Arizona State University, US

Self-consistent semiconductor device modeling requires repeated solution of the 2D or 3D Poisson equation that describes the potential profile of the device for a given charge distribution. As a result, efficient methods for the solution [...]