MEMS & NEMS Devices, Modeling & Applications – Page 63

Macromodel Extraction of Gas Damping Effects for Perforated Surfaces with Arbitrarily-Shaped Geometries

Yang Y-J, Yu C-J, National Taiwan University, TW

In this work, we present an application of an Arnoldi-based model order reduction (MOR) technique on squeezed-film damping (SQFD) effects for arbitrarily-shaped perforated geometries. The compact models generated by this approach not only can be [...]

Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems

Tas N.R., Lammerink T.S.J., Berenschot J.W., Elwenspoek M.C., van den Berg A., University of TWente, NL

This paper presents a lumped network approach for the modelling and design of micro-hydraulic systems. A hydraulic oscillator has been built consisting of hydraulic resistors, capacitors and transistors (pressure controlled valves). The scaling of micro-hydraulic [...]

Simulation of a Micro Dispenser Using Lumped Models

Koltay P., Moosmann C., Litterst C., Streule W., Zengerle R., University of Freiburg, DE

In this paper the modelling of a micro dispenser by system simulations according to fluidic network theory is reported. The dispensing device under consideration (the so called “Nano-Jet” dispenser) is described in detail in [1]. [...]

Static Equivalent Circuit Model for a Capacitive MEMS RF Switch

Tinttunen T., Veijola T., Nieminen H., Ermolov V., Ryhanen T., Helsinki University of Technology, FI

A simulation model for static analysis of a doubly supported capacitive MEMS RF switch has been constructed using electrical equivalencies. Energy-conserving large-displacement macro models for beam deflection, gap capacitance, electrostatic force, and mechanical contact are [...]

Micromechanical Pierce Oscillator for Resonant Sensing Applications

Seshia A.A., Low W., Bhave S.A., Howe R.T., Montague S., University of California, US

We present the design techniques and experimental characterization of a Pierce oscillator circuit adapted for micromechanical elements with resonant frequencies lying between 100 and 300 kHz. Micromechanical double-ended tuning fork resonators serve as the crystal [...]

Coupled-Energy-Domain Macromodeling of MEMS Devices

Casinovi G., Georgia Institute of Technology, US

This paper describes a systematic approach to the development of multi-energy-domain macromodels of MEMS devices. This approach is based on a particular form of the coupled algebraic-differential equations describing the dynamics of the device. All [...]

Noise Considerations for Closed Loop Digital Accelerometers

Gaura E., Kraft M., Coventry University, UK

This paper investigates the noise shaping properties of a sigma-delta modulator type control system applied to a micromachined accelerometer. Three noise sources are present in such an electromechanical closed loop system: mechanical noise due to [...]

Nonlinear Analytical Reduced-Order Models for MEMS

Westby E.R., Fjeldly T.A., Norwegian University of Science and Technology, NO

We present a method for constructing a nonlinear, analytical, reduced-order model for MEMS-structures. The method is based on the center manifold approach for describing nonlinear modes of mechanical systems, in combination with techniques for predicting [...]

Behavioral Modeling of a Humidity Sensor Using an Analog Hardware Description Language

Tételin A., Lévi H., Mongellaz B., Pellet C., Laboratoire IXL, FR

Measuring relative humidity in breath is useful for diagnosing pulmonary diseases. Humidity capacitive sensors were developed to equip a portable clinical device. Simulation is needed to design an electronic interface circuit to be integrated on [...]

Integrated Hierarchical Design of Microelectrofluidic Systems using SystemC

Zhang T., Chakrabarty K., Fair R.B., Cadence Design Systems, Inc., US

This paper describes the role of SystemC in developing an integrated modeling and simulatio environment for microelectrofluidic systems (MEFS). Based on the unique modeling and simulation needs for MEFS, we examine suitability of several existing [...]