Sensors, MEMS, Electronics – Page 364

Modeling of Ionic Hydrogel Kinetics in Buffered Solutions

Ohs R.R., De S.K., Aluru N.R., University of Illinois at Urbana-Champaign, US

In this paper, we present the meshless Finite Cloud Method (FCM) for the solution of a time-dependent partial differential equation governing ionic gel swelling. Using a point distribution, FCM constructs interpolation functions without assuming any [...]

Numerics, Algorithms

Multiscale Modeling of Microfluidics

Karniadakis G., Brown University, US

Micro-electro-mechanical systems involve complex functions governed by diverse transient physical and electrical processes for each of their many components. This is an example of a coupled-domain simulation, i.e., the simultaneous simulation of different functional units [...]

Towards Predictive TCAD and Fab Integration

Fichtner W., Swiss Federal Institute of Technology, CH

This paper gives an overview of the status of technology computer-aided design (TCAD) as it is used today for research, development and manufacturing projects in the micro- and opto-electronics industry. While the accurate and physics-based [...]

Plenary lectures

Analysis of Realistic Large MEMS Devices

Ljung P., Bächtold M., Spasojevic M., Coyote Systems, Inc., US

A high-speed high-accuracy 3D field solver for the solution of coupled multi-physics encountered in MEMS is presented. The software AutoMEMS enables automatic model generation from layout, automatic meshing, adaptive mesh refinement of large complex geometries [...]

A Computational Framework for Modeling One-Dimensional, Sub-Grid Components and Phenomena in Multi-Dimensional Micro-Systems

Pindera M.Z., Bayyuk S., Upadhya V., Przekwas A.J., CFD Research Corporation, US

This paper presents a framework for modeling essentially one-dimensional devices and components embedded in multi-dimensional spaces. The main characteristic and main advantage of the new methodology is that the one-dimensional and multi-dimensional objects or domains [...]

Modified Nodal Analysis for MEMS with Multi-Energy Domains

Clark J.V., Zhou N., Pister K.S.J., University of California at Berkeley, US

A modified nodal analysis approach for the design, simulation, and display of three-dimensional microelectro-mechanical systems with coupled energy domains is presented. Static, steady-state, and transient algorithms are introduced followed by examples. Transient and static analysis [...]

Numerical Simulation of Micro Assembly Techniques in MEMS Devices

Finch N., Keating D., He Y., IntelliSense Corporation, US

This paper presents research on numerical simulation of the micro-assembly of MEMS devices. Recent developments in MEMS devices ñ making use of multiple deposition layers, micro-fabricated hinges, and actuators ñ have enabled fabrication of MEMS [...]

GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS

Wilson N., Wang K., Yergeau D., Dutton R.W., Stanford University, US

This paper will detail the capabilities of a new geometric modeling tool, called Geodesic, which is being released in source code form to the general community. In addition to providing geometric operations to create geometry [...]