NEMS and MEMS Fabrication – TechConnect Briefs

Wafer Scale Fabrication of Nano Probes for Atomic Force Microscopy

Ye Q.L., Liu H., Cassell A.M., Chao K-J, Han J., NASA Ames Research Center, US

The key hurdle in nanoscience and nanotechnology is the large-scale integration of nanoscale materials with micron-scale electronics/structures to form functional devices. We report an innovative bottom-up wafer-scale fabrication approach that combines nanopatterning and nanomaterials synthesis [...]

Effect of Etchant Composition and Silicon Crystal Orientation on Etch Rate

Yellowaga D., Starzynski J., Palmer B., McFarland J., Drews S., Honeywell, US

Wet etchants can be used for the purpose of wafer thinning to meet die stacking and packaging requirements, stress relief when physical methods of thinning are used, as well as texturing to improve adhesion with [...]

Fabrication of Complex Diffractive Structures in an Organic-Inorganic Hybrid and Incorporation of Silver Nanoparticles

Scholes F.H., Smith F.L., Furman S.A., CSIRO Manufacturing and Infrastructure Technology, AU

Organic-inorganic hybrids have recently attracted considerable interest. These materials, which are synthesized by the highly versatile sol-gel process, consist of interpenetrating organic and inorganic networks at the nano- to molecular size scale. Incorporating photo-polymerizable groups [...]

Fabrication of Nanochannels with Microfluidic Interface using PDMS Casting on Si/Ti Nanomold

Rust M.J., Subramaniam S., Ahn C.H., University of Cincinnati, US

In this abstract, the fabrication of nanochannels using poly (dimethylsiloxane) (PDMS) casting on Si/Ti mold is proposed and results are presented. This work can possibly enable the mass-production of low cost nanochannels to study basic [...]

Direct Patterning of Functional Materials via Atmospheric-Pressure Ion Deposition

Hamedinger T.E., Steindl T., Albering J., Rentenberger S., Saf R., Graz University of Technology, AU

Interest in thin films of functional organic materials has increased enormously in the past years because of various possible applications. Here we report an experimental setup for the processing of various organic materials into thin [...]

A Gate Layout Technique for Area Reduction in Nano-Wire Circuit Design

Hashempour H., Lombardi F., LTX Corp., US

An strategy for developing integrated circuits with many individual nanodevices has yet to be formulated. This paper presents an homogeneous (array-based) approach for designing and manufacturing digital circuits using nanotubes or nanowires. By targeting contacts [...]

Pressure Sensor Elements Integrated with CMOS

Kiihamäki J., Vehmas T., Suni T., Häärä A., Ylimaula M., Ruohio J., VTT Information Technology, FI

We report the measurement and fabrication results of monolithically integrated capacitive pressure sensor elements. The device fabrication process is based on novel plug-up process, which enables monolithical integration of sensors and CMOS in a modular [...]

Development of Self-Assembled Robust Microvalves with Electroform Fabricated Nano-Structured Nickel

Li B., Chen Q., University of Central Florida, US

The microvalve for the hydraulic actuatora need large flow rate (>10 cc/second, displacement related), high-pressure support ability (>10 MPa) and a high operational frequency (>10 kHz) [1, 2]. Microvalves can match the piezoelectric material’s frequency, [...]

Diode Laser Welding of Planar Microfluidic Devices, BioMEMS, Diagnostic Chips & Microarrays

Chen J-W, Zybko J., Clements J.T., NanoSciences, Inc., US

As polymer-based microfluidic devices, lab-chips and diagnostic platforms are pushed towards increasingly smaller geometries, advances in diode laser technology now allow for cleaner and more precise assembly. Coupling the use of photolithographic methods and mask-sets [...]

A Unified Compact Model for Electrostatic Discharge Protection Device Simulation

Chou H-M, Cho Y-Y, Chou H-M, Lee J.W., Li Y., National Chiao Tung University, TW

In modern microelectronics manufacturing, whole chip electrostatic discharge (ESD) protection circuit design is necessary for obtaining robust electrical performance [1-5]. In designing the whole chip ESD protection circuit, owing to its high circuit complexity, an [...]

Direct Wafer Polishing with 5 nm Diamond

Sung J.C-M, Tai M-F, Kinik Company, TW

CMP for making future semiconductor chips with nanom (nano meter) feature sizes can be accomplished by using nanom diamond particles embedded in an organic matrix (e.g. epoxy). Such nanom diamond particles are derived from the [...]

Fabrication of Well-aligned and Mono-modal Germanium Dots on the Silicon Substrate with Trench-ridge Nano-structures

Chen P.S., Chen Y.J., Peng Y.H., Chen P.S., Chen Y.J., Kuan C.H., National Taiwan University, TW

Here we report the ability to fabricate well-aligned and mono-modal Ge dots on the silicon substrate with nano-trenches. It is started with electron beam lithography system (E-beam) to make patterns. Then reactive ion etching (RIE) [...]

Application of Magnetic Neutral Loop Discharge Plasma in Deep Quartz and Silicon Etching Process for MEMS/NEMS Devices Fabrication

Morikawa Y., Hayashi T., Suu K., Ishikawa M., ULVAC, Inc., JP

ULVAC’s Si deep etching technique has achieved high etching rate as high as 20 um/min as well as extremely high selectivity over resist mask as high as 100 or higher ensuring good etching performance.

Microfabricated Silicon Apertures for Ion Channel Measurement

Wilk S.J., Goryll M., Petrossian L., Laws G.M., Goodnick S.M., Thornton T.J., Saraniti M., Tang J.M., Eisenberg R.S., Arizona State University, US

Ion channels are proteins that act as pores in cell membranes and allow only specific ions to pass through the cell wall. Here, we present a method for microfabrication of apertures in a silicon substrate [...]

A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers

Cooper A.W., Docker P.T., Ward M.C., The University of Birmingham, UK

This paper describes a novel technique for manufacturing optical gratings by using the one step DRIE (Deep Reactive Ion Etching) process. Using the notching effect documented in previous work when working with silicon on insulator [...]

Absolute Pressure Measurement using 3D-MEMS Technology

Russell R., Meriheinä U., VTI Technologies, US

The use of 3D-MEMS processes has created yet another new breakthrough. Extremely small silicon capacitive absolute pressure sensors can now be realized by utilizing the same MEMS technology that has been in production for many [...]

Fabrication of Silicon Nanowires Using Atomic Layer Deposition

Gopireddy D., Takoudis C.G., Gamota D., Zhang J., Brazis P.W., University of Illinois at Chicago, US

We will present the synthesis of silicon nanowires using Atomic Layer Deposition (ALD) technique. ALD allows the growth of nanowires in a controlled fashion using the nanoparticles as the seed. The diameter and the length [...]

Metal-oxide Nanowires for Toxic Gas Detection

Devineni D.P., Stormo S., Kempf W., Schenkel J., Behanan R., Lea S., Galipeau D.W., South Dakota State University, US

The objective of this work was to determine the feasibility of using EFEO to fabricate indium-oxide nanowires that could be used for sensing NO2 and O3. The effects of fabrication parameters such as indium film [...]

Microfabrication of 3D Structures Using Novel Thermoplastic Elastomers

Sudarsan A.P., Wang J., Ugaz V.M., Texas A&M University, US

We demonstrate the use of novel thermoplastic elastomers synthesized by dissolving readily available polystyrene–(polyethylene/ polybutylene)–polystyrene (SBS/SEBS) triblock copolymers (e.g., Kraton™ G series) in hydrocarbon oils for which the ethylene/butylene midblocks are selectively miscible. The insoluble [...]

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